Surface passivation of silicon solar cells describes a technology for preventing electrons and holes to recombine prematurely with one another on the wafer surface. It increases the cell's energy conversion efficiencies and thus reduces the cost per kWh generated by a PV system.

In the past few years, new tools have been developed to ensure low cost of ownership for high volume production of passivated silicon solar cells. Different deposition techniques (ALD, PECVD, APCVD) and different materials (SiO₂, Al2O₃, Si₃N₄) have been tested during the development process of more than 10 years. Now, the silicon solar cell manufacturing industry is picking up the concept of rear side passivation. The next generation silicon solar cells in production will be the PERC (Passivated Emitter and Rear Cell) type using all the reported achievements including novel tool concepts and process technologies.

This timely overview of silicon solar cell surface passivation, written by the leading experts in the field, is a key read for students and researchers working with silicon solar cells, as well as solar cell manufacturers.